Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers

Matthias F. Koch; Maria Russew; L. Scharfenberg; Andreas Benker; Arne Schleunitz; Gabi Grützner

doi:10.1117/12.2658408

30 April 2023 Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers

Matthias F. Koch, Maria Russew, L. Scharfenberg, Andreas Benker, Arne Schleunitz, Gabi Grützner

Author Affiliations +

Proceedings Volume 12497, Novel Patterning Technologies 2023; 124970M (2023) https://doi.org/10.1117/12.2658408
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Hybrid Polymers are a material class established in the industry for manufacturing of high-performance optical components, mainly patterned by (nano)imprint processes. Recently, the application range of Hybrid Polymers has been extended into bonding and passivation. In this context, patterning by classical UV-lithography has come into focus as an alternative patterning method to (nano)imprinting. By applying a two-stage curing process with a high intensity, low dose patterning step and a high dose flood exposure after development, it is possible to realize previously unattainable resolutions limits for Hybrid Polymers of 6μm L/S and aspect ratios of more than 3.

Conference Presentation

Citation Download Citation

Matthias F. Koch, Maria Russew, L. Scharfenberg, Andreas Benker, Arne Schleunitz, and Gabi Grützner "Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers", Proc. SPIE 12497, Novel Patterning Technologies 2023, 124970M (30 April 2023); https://doi.org/10.1117/12.2658408

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available